高纵横比探针(High Aspect Ratio Probes),用于tapping mode测量和小特征测量,高长宽比“超级圆锥(Super Cone)”conical探针。
适用的Sample:
Ceramics,Other Hard Samples,Other Soft Sample,Polymers
适用的AFM机型:
DimensionIcon,DimensionXR,Innova,Non-Bruker
适用的Work Mode:
tapping or non-contact
适用的Application:
General Topography,Holes/ Trenches
cantilever Back side coating | Reflective Aluminum |
---|---|
tip coating | -- |
tip geometry | Conical |
---|---|
tip radius (Nom) | 8nm |
tip height | 7-11um |
Front Angle (FA) | 10± 2° |
Back Angle (BA) | 10±2° |
Side Angle (SA) | 10±2° |
cantilever geometry | Rectangular |
---|---|
K(Nom) | 35N/m |
Frequency(Nom) | 350KHz |
length(Nom) | 125um |
thickness(Nom) | 4um |
cantilever material | 0.01 - 0.025 Ωcm Antimony (n) doped Si |
top layer back | 40 ±10 nm of Al |